Water is one of the influence of pollutants in the process of semiconductor manufacturing, accurate measuring moisture, humidity and temperature

Circulating semiconductor manufacturing a word: "this is not rocket science, but is much more difficult than rocket science!"Although it was a joke, but from a certain extent, reflects the fact that the semiconductor manufacturing process are both complicated and time consuming, manufacturing cycle for up to 12 to 20 weeks.Huge initial investment, needed for manufacturing semiconductor manufacturing process needs of equipment is very expensive.Before the start of the new round of investment cycle, a manufacturing cycle is usually lasts for about six years, and the entire production process is relatively low profit margins, this means that only high production to guarantee profits.Therefore, avoid production of waste and bad product is crucial.

Water is one of the influence of pollutants in the process of semiconductor manufacturing, some estimates indicate that the loss caused by inappropriate humidity conditions account for 25% of the income loss.In order to avoid problems, product quality and output in the process of semiconductor manufacturing must be particularly careful monitoring of the humidity and temperature levels.Measurement of visa pull solution is suitable for the manufacturing process of the key steps, response very quickly, and can adapt to various environmental conditions.In this article, we introduce the humidity, moisture, trace moisture parameters such as relative humidity, dew point and frost point.

High-tech nano-scale semiconductor manufacturing

For nanoscale ultrapure applications such as semiconductor manufacturing, high-tech in removing impurities such as dust, grease and other pollution elements, may trace residual moisture.This could have an adverse effect on product quality and yield.Although it is impossible to completely eliminate the process of each water molecules, but we should use accurate measuring tool to a large extent reduce the moisture content.

Cleanroom hvac

Clean room air conditioning (HVAC) systems are usually built in the air handling unit or fan filter unit.Water pollution may process, and the technological process of chemical reaction or lead to electrostatic discharge (ESD) problems.In some cases need to + / - 2% relative humidity measurement accuracy and + / - 0.25 ° C temperature measurement accuracy.Visa, transmitter is very suitable for control the ventilator internal or clean room air conditioner on the wall.

According to the process in the clean room, the target might be different humidity and temperature.Visa to pull the HUMICAP ® sensor technology in any response environment very quickly, and high accuracy, has good long-term stability and longer maintenance intervals.HUMICAP sensor based on polymer film technology and manufacturing in the visa to pull their own clean room.

Process pipeline gas quality

Clean room operation need high quality gas, the process of the monitoring level of humidity in the process of pipeline gas can prevent may lead to material loss of water pollution.Goal is usually as far as possible to reduce the moisture content, and to monitor the correct parameter is the dew point.Choosing sensor, fast response and condensation properties is very important, because the two helps to ensure the reliable operation, even after long downtime can achieve smooth acceleration process.

Visa pull DRYCAP ® technology using our proprietary polymer film technology, the technology can achieve high sensitivity, according to various environment, and application of flexible optimization, even in harsh environments with long-term stability.Purifying function can remove residues in the film do not need to, even in sub-optimal conditions can ensure long-term accuracy.

Visa, automatic calibration function using proprietary design and algorithm can eliminate environmental aging effect on the structure of the sensor.Long-term monitoring sensor performance is helpful to correct the sensitivity changes, improve the long-term stability, make its service life far beyond the traditional sensors, and reducing the bad environmental conditions on its performance.Visa pull sensor response speed, can the system fails to respond quickly to prevent the material loss.

The compressed air quality

Compressed air cleanliness is vital for most industrial facilities of the clean room environment, so the target excess moisture content is very low: target level is lower than dew point - 80 ° C, usually the system will set up multiple alert level, as soon as the alert level beyond this goal is.Visa in the entire measuring range, products have to pass strict testing and calibration, to ensure that the sensor readings, highly accurate, reduce the risk of the high cost of excessive and dry.Visa humidity sensor unit response very quickly, and can alarm in time, allows customers to quickly identify and solve any problems.