case

Beyond can see, not what

Semiconductor manufacturing
China
Published: Four month 18, 2023
Industrial manufacturing and process
Industrial measurement

Intelligence is the escort of IC manufacturing clean room technology

- visit to CLP four company market management center general manager zhang qi

With the upgrading of the market environment and the national policy of benefit drive, new energy vehicles, intelligent driving, intelligent terminal, and 5 g downstream industries such as a surge in demand for integrated circuits.As a typical advanced industry, integrated circuit manufacturing to the production environment and process requirement is very strict.Among them, the construction of the clean room is the key link in integrated circuit manufacturing, has a vital influence on the performance of the final product.

As China's earliest professional engaged in the clean room electrical and mechanical equipment installation engineering company, one of China's electronic system engineering fourth construction co., LTD. (hereinafter referred to as the "CLP four company") to provide integrated circuit manufacturing enterprise with design, procurement, project management, construction, facility management, clean room products manufacture and so on the integration of "turnkey" engineering services.

In 2021, in Beijing set electric holdings co., LTD. (hereinafter referred to as the "Beijing collector") IC workshop clean room construction projects, the CLP four company to meet customer requirements for environmental monitoring of high accuracy and high stability, selection and visa cooperation, will HMT330 industrial temperature and humidity transmitter, temperature and humidity transmitter intrinsically safe HMT370EX HMT120 etc. Series of products, and the temperature and humidity transmitter successfully applied in Beijing collector workshop clean room.Since application, the related instruments and running stability in the transmitter, measure accurately.

Lies will create high standards of clean workshop

Wear tightly closed special protective clothing and shoe covers, through strict workshop xiaosha processes, and through several independent isolation gate of the workshop, the operator can enter the standard strict IC workshop clean room.Is different from general industrial products, integrated circuit from monocrystalline silicon chip manufacturing to IC manufacturing and important step in the IC packaging, must be completed in the clean room.Minute particles of dust and debris, or intangible environment temperature and humidity, will have a significant impact on the manufacturing process.

"Integrated circuit manufacturing is very high to the requirement of production environment, the need for parameters such as temperature, humidity is very accurate and stable measurement, to ensure the production environment is stable and reliable."CLP four said zhang qi, general manager of the company to market management center "in 2020, in Beijing early collector clean room project bidding stage, we know that visa, related products can fully meet customers' stringent requirements for temperature and humidity measurement.So, we decided to use visa to pull products as a measuring instrument for bidding, which is opened with the depth of the visa, a series of cooperation."

Along with the upgrade of integrated circuit manufacturing process, the manufacturing process needs clean degree is rising, for the clean room construction put forward higher requirements.According to introducing, Beijing collector made of integrated circuit technology has break through 28 nm, corresponding to the clean room environment temperature error of plus or minus 0.3 ° C, humidity of error of plus or minus 3%.As soon as the temperature and humidity breakthrough limit error, will significantly influence the yield of the products, the use of performance and reliability.

According to the above application environment, visa products such as HMT330, HMT120 and HMT370EX play an important role in it.The HMT330 can achieve in the bad environment and strict demand precise measurement, can also according to different application environment to implement custom, to meet the diverse needs of customers.HMT120 is a specially designed for clean room environment such as temperature and humidity transmitter, intelligent measuring probe field replacement, easily implement measurement traceability.

It is worth mentioning is "intrinsically safe" function of temperature and humidity transmitter HMT370EX.Even in the case of wrong operation or malfunction, the product will not cause an accident or equipment damage.So far, this product has obtained a number of essential safety certification.In addition to the measurement of relative humidity and temperature, HMT370EX also support other humidity output parameters, such as dew point temperature, wet bulb temperature, absolute humidity, mixing ratio, concentration of water, the water mass fraction, vapor pressure and enthalpy.

The measuring accuracy of "visa products not only can completely satisfy the design criteria of the clean room, the more sharp compression standard error range: to be reduced to a third of the error, benchmarking reached plus or minus 1% humidity, temperature, plus or minus 0.1 ° C, fully guarantee the reliable operation of the clean room."Zhang qi added, "for the sake of the accuracy and stability of the whole project, visa, the measuring instrument of become the ideal choice for our project."

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The Vaisala HMT330 delivers accurate measurements in harsh environments and under demanding requirements, and can also be customized for The company application environments to meet diverse customer needs.

MAU HMT330 in the system

Break block's quick response across the sea

For advanced engineering construction, the importance of aging is self-evident.Required for the project in all kinds of products and materials tend to have strict delivery cycle, the lack of a key materials, will directly affect the progress of the project.And fluctuations in the global outbreak, add a bit to product delivery time uncertainty.

"International logistics have to be booked in advance, superposition outbreak, some of the scarce material and products need to order for half a year or more in advance."Zhang qi said, "Beijing collector project cycle is very nervous, however, the quality of the measurement products is of great significance to the completion of project, we were very worried about visa can pull the product the arrival of the goods in time."

Something urgent expedient.Under the background of product supply tension, visa agent and actively cooperate with, with the CLP four companies reached a preliminary purchase intentions, have not yet signed a formal purchase contract, lock the products needed for the project ahead of schedule, and coordinate internal and external resources fully, the product will be sent to customer on schedule.

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Vaisala HMT370EX wall installation

With "intrinsically safe" function of the temperature and humidity transmitter HMT370EX

"Beijing collector project completed on schedule, the indicators have reached the expected.The stable running related projects, so far, the customer did not feedback any after sales needs.Without after-sale demand, is also a high recognition of the quality of our products."Talk about cooperation process, lost in a myriad of zhang qi, "for the sake of our project, visa docking colleague overcame many difficulties, give the biggest support.This improves our both sides of the trust, let us very touched, also for the subsequent cooperation laid a good foundation."

Every year, such as clean room construction of specialized contracting accounted for about 50% of the CLP four total quantity.Especially in the large area of the cleanroom, super clean clean room, clean room, super ultra high space accuracy for the construction of the clean room, CLP four company has rich experience in engineering and related engineering.

At the same time, the visa, with stable and reliable product performance, excellent products and rapid response services, won the CLP four company's favor and trust.Believe in the near future, visa will be deeper strategic cooperation with CLP four company, power of both brands appear in the building and application of the more advanced products scenes.

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Vaisala HMT120 for semiconductor industry

Temperature and humidity transmitter HMT120

Manufacture of semiconductor wafers and microelectronics is a demanding process, almost no mistakes.The industry is highly dependent on the high performance monitoring instrument, in order to accurately measure the chemical composition and environmental conditions.We provide semiconductor refractometer, used for on-line monitoring the following process point chemical solution concentration: bulk chemical and size distribution, field mixing, rehydration and polishing treatment;We also provide the related instrument for measuring semiconductor tools and facilities within and around the humidity, dew point, temperature and pressure.